Robust PID Controller Design for a Micro-Actuator with Squeezed Gas Film Damping Effects
نویسندگان
چکیده
In this article the modeling aspects of an electrostatic microactuator (μ-A) with squeezed thin film damping effects are presented. The μ-A is composed of a microcapacitor whose one plate is clamped on the ground while the other plate is floating on the air. Its highly nonlinear dynamic model is linearized at various operating points. A robust PID-controller is designed with its parameters-tuning relying on LMIs. This control effort of the PID-controller in collaboration with a feedforward term and a notch filter is applied to the system. Simulation results are used to investigate the efficacy of the suggested control architecture.
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